The equipment is equipped with unique megahertz ultrasonic
technology (800kHz - 1MHz). By utilizing the tiny cavitation
bubbles generated by high-frequency vibrations, it can precisely
remove micron-level impurities such as photoresist residues and
metal ion contaminants on the chip surface, without causing damage
to the fragile circuit structure and nanoscale surface of the chip.
Combined with a specialized chemical cleaning process, appropriate
cleaning agent formulations are used for different types of chips
(such as logic chips and memory chips) to achieve efficient and
safe cleaning results.
The cleaning process adopts a modular design, including
pre-cleaning, ultrasonic fine cleaning, multi-stage ultra-pure
water rinsing, nitrogen blow-drying and other processes. The
ultra-pure water system is equipped with an EDI ultra-pure water
module, producing ultra-pure water with a conductivity ≤0.1μS/cm,
effectively removing ionic impurities in water and avoiding
secondary pollution. In the nitrogen blow-drying process,
high-purity nitrogen (purity ≥99.999%) is used to quickly dry the
chip surface, preventing water stains and oxidation, and ensuring
that the chip surface meets the Class 10 cleanliness standard.
Customization and Versatility
Modular Design: Supports customization of tank volume (100L-1000L) and ultrasonic
frequency (25-120kHz) to adapt to the size and material
requirements of different workpieces.
Multi-Industry Applicability:
- Medical Field: Sterile cleaning of surgical instruments and implants;
- Aerospace: Removal of lubricants and oxidation layers from turbine blades;
- Electronics: Precision cleaning of microchips and optical components.
Technical Whitepaper Access
Download the detailed guide "Optimizing Precision Cleaning with Multi-Stage Ultrasonic and
Steam Technology" to understand how this system addresses cleaning challenges
in modern manufacturing.
Factory-Direct Support
We provide end-to-end customization services from tank design to
software programming, backed by 24/7 technical support and a global
network of service centers.
Request a Demo
Schedule an on-site demonstration to experience the system’s
cleaning capabilities for your specific workpieces.
