Electron Beam Evaporator

Main parameter index:
1. ultimate vacuum: ≤6.6X10³Pa
2. vacuum acquisition system adopts molecular pump + mechanical pump unit
3. continuous pumping for 30 minutes, the vacuum degree ≤86X10³Pa
4.E type electronic gun, maximum voltage 8-10KV, power 8KW
5. pieces of base diameter of 400mm, can be heated to below 300℃, with water cooling, substrate speed adjustable, adjustable target substrate distance
6. film thickness measurement, equipped with quartz crystal film thickness instrument, a water cooled probe