Description Laser interferometer is recognized as a high precision, high
sensitive measuring method by applying light wavelength as
criterion, and is widely used in high-end manufacturing domain.
SJ6000 laser interferometer insists of high-frequency Helium-Neon
laser generator from a USA supplier, high-precision environmental
compensation modules, high-precision laser interference signal
processing system, high-performance computer control system. By
applying with thermal frequency stabilization technology of laser
dual-longitudinal mode and geometric parameters interference
optical path design, SJ6000 can output long-term stable and
high-precision(0.05ppm) laser quickly(about 6 minutes) which has
powerful anti-interference performance. With different prism
modules, it can measure linearity, angle, straightness, Flatness
and perpendicularity, in addition it can analyze dynamic
characteristics. SJ6000 has many advantages, such as high
precision, high speed, high resolution, long range. Functions 1. High precision of measurement: Resolution is up to nanoscale
based on the technology of laser interferometry;With high-precision
environmental compensation unit, influences to measuring result
from ambient temperature, pressure, humidity and material
temperature are eliminated;It can ensure long-term frequency
stability of laser by using the laser thermal frequency
stabilization control system;The design of separating
interferoscope from host avoids heat distortion of interferoscope,
which ensures the stability of interference optical path.
2. It can measure linearity, angle, straightness, perpendicularity
and other geometrical parameters;It can measure the linear
positioning accuracy and repeated positioning accuracy of guide
rails for CNC machine tools, coordinate measuring machines and
other precision motion equipments;It can measure the pitch angle,
swing angle, perpendicularity and straightness of the guide rails,
in addition it can calibrate rotary axis of machine tools.
3. According to compensation settings by user, the system
automatically generates error compensation table for calibration of
machine tools.
4. With functions of Dynamic measurements (displacement-time curve,
velocity-time curve, acceleration-time curve), amplitude
measurement and frequency analysis, it can analyze vibration test
of machine tool, dynamic characteristics of ball screw, response
characteristics of drive system, dynamic characteristics of guide
rail and so on.
5. Built-in domestic & international standards, such as GB,
ISO, BS, ANSI, DIN, JIS and so on. The system analyzes and
processes data according to relevant standard, finally generates
test reports including corresponding carve charts and data.
6. Can automatically acquire the parameters of environment
temperature, material temperature, environment humidity and
atmospheric pressure. Can set environmental compensation by hand,
or by system automatically.
7. With centralized database management for measuring records, the
user can query and manage the measuring records according to object
type, testing institution, manufacturing number, inspector,
submitted institution, equipment number, inspection date and
effective date;Can export the data to Word, Excel, AutoCAD
(optional) files.
8. Easy to install: Basic weight 15kg, convenient and portable. |
Parameters | System parameters | Environmental sensors | 1. Measuring method: single frequency | 1. Atmospheric temperature sensor : ±0.1℃ (0-40)℃, resolution:
0.01℃ | 2. Laser frequency accuracy: 0.05ppm | 2. Material temperature sensor: ±0.1℃ (0-40)℃, resolution: 0.01℃ | 3. Dynamic capture rate: 50kHz | 3. Atmospheric humidity sensor: ±5% (0-95%) | 4. Warm-up time: about 6 min | 4. Atmospheric pressure sensor: ±0.1kPa (65～115)kPa | 5. Operating temperature: (0-40)℃ | | 6. Environment temperature: (0-40)℃, humidity: 0-95% | | 7. Storage temperature: -20℃-70℃ | | | Linear measurement | Angle measurement | 1. Measuring range: (0-80)m | 1. Axial range: (0-15)m | 2. Measuring accuracy: 0.5ppm (0-40)℃ | 2. Measuring range: ±10° | 3. Measuring resolution: 1nm | 3. Accuracy: ±(0.02%R+0.1+0.24M)″ (R is indicating value, unit: ″;M
is measured length in m) | 4. Maximum measuring speed: 4m/s | 4. Measuring resolution: 0.1″ | | Flatness measurement: | | 1. Axial range: (0-15) m | | 2. Flatness measuring range: ±1.5 mm | | 3. Accuracy: ±(0.2%R+0.02M2) μm (R is indicating value in μm;M is
measured length in m) | | 4. Substrate size: 180mm adjustable, 360mm adjustable | | 5. Measuring resolution: 0.1μm | | | Straightness measurement: | Item | Axis range | Measuring range | Accuracy | Resolution |
|---|
Short straightness | (0.1-4)m | ±3.0mm | ±(0.5+0.25%R+0.15M2)μm | 0.01μm | Long straightness | (1-20)m | ±3.0mm | ±(5.0+2.5%R+0.015M2)μm | 0.01μm | Note: R is indicating value in μm; M is measured length in meters | | Perpendicularity measurement | Item | Axis range | Measuring range | Accuracy | Resolution |
|---|
Short straightness | (0.1-3)m | ±3.0mm | ±(2.5+0.25%R+0.8M)μm/m | 0.01μm | Long straightness | (1-15)m | ±3.0mm | ±(2.5+2.5%R+0.08M)μm/m | 0.01μm | Note: R is indicating value in μm; M is measured length in meters |
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