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Tungsten Filament Scanning Electron Microscope / Sem Electron Microscope EM69 Std

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KYKY TECHNOLOGY CO., LTD.

City: beijing

Province/State:beijing

Country/Region:china

Tel:86-010-82541504

Contact Person:
Miss.Katy Zeng
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Tungsten Filament Scanning Electron Microscope / Sem Electron Microscope EM69 Std

Brand Name KYKY
Model Number EM6910
Place of Origin China
Minimum Order Quantity 1
Payment Terms T/T, L/C
Certification CE
Resolution SE:3nm@30KV,8nm@3kV; BSE :4nm@30KV
Magnification 1x-450000x
Specimen Stage Five axes stage
Electron Gun Pre-aligned tungsten filament
Detailed Product Description

As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel, LaB6 upgrade,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market

 

The EM69 series scanning electron microscope with excellent imaging, wide range of expansion attachments, optional low vacuum modules, and rich automation functions, various possibility of customization.

 

 

Advanteges:

◆ Optional low vacuum modules(LVSE,LVBSE)

◆ Rich automation functions

◆ Column/Chamber/Electric System Customization

◆ Optional Big size chamber

◆ Wide field navigation camera

◆ Rich expanding attachments

 

Specifications:

ItemEM6910 Tungsten Filament SEM
ResolutionSE:3nm@30KV,8nm@3kV; BSE :4nm@30KV
Magnification1x-450000x
Electron GunPre-aligned tungsten filament
Accelerating Voltage
0.2kV-30kV
Vacuum system
Turbo Molecular pump +mechanical pump
Objective ApertureMolybdenum aperture adjustable outside vacuum system
Specimen StageFive axes stage
TravelX(Auto)0 ~ 80mm
RangeY(Auto)0 ~ 50mm
 Z(Manual)0 ~ 30mm
 R(Manual)360°
 T(Manual)-5° ~ 70°
Max Specimen Diameter175mm
Detector
Secondary electron detector
Semiconductor BSE detector※
Infrared CCD
 
Low-vacuum SED※/ Low-vacuum BSED ※
ModificationStage Upgrade;EBL; STM; AFM; Heating Stage; Cryo Stage; Tensile Stage ; Micro-nano manipulator; SEM+Coating Machine;SEM+Laser
AccessoriesLaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine
Low vacuum function※
Vacuum level 10-270Pa   SE:4nm@30kv,50Pa
Product Tags: sem electron microscope   sem machine  
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