CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace

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Hefei Chitherm Equipment Co., Ltd

City: hefei

Province/State:anhui

Country/Region:china

Tel:86-0551-62576378

Contact Person:
Mr.zang View Contact Details

CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace

Model Number	MBF100-10
Range of Applications	Industrial
Type	Electric Holding Furnace
Usage	Ceramic Sintering
Fuel	Electric
Atmosphere	Nitrogen
Effective Chamber Dimensions	640640250mm(WHD)
Transport Package	Wooden Packaging
Specification	120012001500mm
Trademark	Chitherm
Origin	China
HS Code	8514101000
Supply Ability	Customized
Customization	Available
Certification	ISO
Place Style	Vertical
Place of Origin	China
Brand Name	Chitherm
Minimum Order Quantity	1
Price	Negotiable
Packaging Details	Customized
Delivery Time	Customized
Payment Terms	Customized

Detailed Product Description

Mbf100-10 Type Chemical Vapor Deposition CVD Furnace 1000 ordm C Melting Furnace Heating Furnace ISO Certified Electric Fuel

1.Equipment Name and Model: MBF100-10 Type Chemical Vapor Deposition Furnace.

The MBF100-10 Type Chemical Vapor Deposition (CVD) Furnace is suitable for medium-temperature heat treatment of electronic products. It is primarily used for gas-phase reaction processes of related materials in atmospheres of nitrogen, helium, acetylene, and hydrogen. It can also be utilized for sintering processes of related materials under protective atmospheres.

2.Technical Specifications and Basic Configuration

Rated Temperature: 750°C
Maximum Temperature: 1000°C
Heating Zone Dimensions: 770 × 770 × 300 mm (W × D × H)
Effective Dimensions: 640 × 640 × 250 mm (W × D × H)
Outer Chamber Material: SUS310S
Inner Liner Material: Fused Quartz
Product Size: Φ120
Equipment Capacity: 16 substrates per batch
Maximum Heating Power: 16 kW
Heating Method: Bottom + Four Sides .
Temperature Control Points: Bottom + Side.l
Thermocouple Type: K-Type
Heating Rate: ≤8°C/min
Heating Elements: FEC Ceramic Fiber Heaters
Furnace Door Opening Method: Top-Opening Design
Temperature Control Stability: ±1°C
Temperature Control Instrument: Imported PID Controller with Auto-Tuning Function
Program Steps: 20 steps
Alarm and Protection: Over-temperature, thermocouple breakage, and other audible/visual alarms, with over-temperature power-off protection.
Surface Temperature Rise: <35ºC.
Weight: about 500kg.
Furnace Dimensions: about 1200×1200×1500mm (W×H×D).

3. Delivery List
	Item	Note	QTY
Basic Compositions	Furnace		1 unit
	Certificates of Inspection	Furnace and major purchased components	1 Set
	Technical Documents	Furnace specifications, technical documents of major purchased components, etc	1 Set
Key Parts	Mass Flow Controller (MFC)	Yamatake or HORIBA	4 Set
	Touch screen		1 PC
	Temperature Controller		1 Set
	FEC Heater		1 Set
	Quartz Liner		1 Set
Spares	SSR		1 PC

4. Facility Requirements
4.1 Environmental conditions: Temperature 0 - 40ºC, humidity ≤ 80% RH, no corrosive gas, no strong
airflow disturbance.
4.2 Ground requirements: level, no obvious vibration, bearing capacity > 500Kg/m².
4.3 Power conditions: capacity greater than 22kVA, 3 phases 5 lines, voltage 220/380V, frequency
50Hz(according to local situation). Live wire: yellow, green, red, neutral wire: blue, ground wire: yellow-green;
4.4 Installation site: 1500mm×1500mm×3000mm (W×H×D), installation area greater than 2.5m².

Product Tags: Heating chemical vapor deposition furnace 1000 Ordm chemical vapor deposition furnace 1000 Ordm cvd furnace

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CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace

CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace

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