64-21127D 03-21127/M 02-15467 / CQ ASM Plc Module

64-21127D 03-21127/M 02-15467/CQ ASM plc module

Product Details

Features:

True vapor mass flow in bubbler systems.

Defeats influence of liquid level, temperature and pressure.

Liquid level surveillance possible.

Mounting position insensitive.

Good surface finish for ultra clean operation.

Various gas fitting configurations.

Heating temperature of bubbler much lower compared with direct vaporization.

Thermal control valve design gives : reliability,a normally open flow path for gas line

purging when power is off

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