Automatic Wafer Loader Unloader Advanced Technical Ceramics Wafer Suction Plate
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Ceramic Wafer Suction Plate for Automatic Wafer Unloader and Loader
Key word: Ceramic Wafer Suction Plate
Ceramic wafer suction plate play a key role on the wafer transfer equipment as automatic wafer unloader and wafer loader machinery .
LPCVD ceramic wafer vaccum suction plate are mainly used in the solar semiconductor thin film making , like the diffussion wafer load and unload machine . It used for wafer loading and unloading .
Equipment Name: Automatic Wafer Unloader
Equipment Type: LXP-Ⅲ-B/LXP-Ⅲ-C
Equipment Application: Unload the wafers from 5-lane or 8-lane inline cleaning equipment to cassettes.
Technical Characteristics
· MES management function. · With PLC control and the loading process is completed automatically; Touch-screen operation, which is easy and clear. · Unload wafers from single lane and adopt buffer unit, which is easy to operate, the equipment will not stop during cassette swap and guarantee unloading efficiency. · Breakage detection and treatment before wafer unload to the unloader. (Extra charges ) · The wafer cassette’s baseplate can be cycled automatically. (Extra charges)
Mingrui Manufacture zirconia Ceramic wafer boat used on automatic wafer handling system diffusion furnace . As zirconia ceramic with the charactheristic of wear resistant , high temperature resistant, ceramic wafer boat is a good choice for wafter carrier .
Integrated wafer loading& unloading, unloading the diffused wafers from the ceramic wafer boat to the cassette or loading the textured wafers from the cassette to
the ceramic wafer boat . Available for double back-to-back wafers in one slot in ceramic wafer boat which realize single side diffusion or available for single wafer
in a slot for double side diffusion process. With continuous wafer
loading&unloading can guarantee the continuous production . Or
be used only for wafer loading or unloading is also available. A ceramic wafer boat for housing a semiconductor or a solar wafer comprising at least one wafer support member containing at least one slot
capable of receiving at least a portion of a peripheral edge of a
wafer, wherein in the wafer support member comprises silicon
carbide; and at least one structural member for conveying the wafer boat into
and out of a processing device connected to the wafer support
member , wherein the structural member is comprised of a ceramic
material that is not silicon carbide.
Technical Characteristics
· With continuous wafer loading& unloading can guarantee the continuous production. Or be used only for wafer loading or unloading is also available. · With perfect detection and alarm system which guarantees the stable and automatic operation. · With circulation method of the cassette baseplate which reduce the labor intensity. · Modular control program structure, highly repeatable and readable, which is convenient for function expansion in future and maintenance; · With recipe data design which enables the equipment to work with various kinds of ceramic wafer boat with different accuracy, while running equipment will follow the boat No. automatically and retrieve the corresponding recipe data without human intervention.
prameter :
Zirconia ceramic date sheet :
To see how we can assist you with your solar energy project, contact us today.
Industrial Ceramic Intriduction
Mingrui Ceramics has years of experience designing and developing technical ceramic solutions for a wide variety of applications and industries. High Temperature Refractory Machining Ceramic Parts Laser Equipment. We offer this expertise to all of our customers to ensure the best design and materials are chosen for their specific application and needs. High Temperature Refractory Machining Ceramic Parts Laser Equipment, Typically, our custom technical ceramic components and parts we supply are used for one of three main reasons:
FAQ Q: Are you trading company or manufacturer ? A: We are factory. Q: How long is your delivery time? A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity. Q: Do you provide samples ? is it free or extra ? A: Yes, we could offer the sample for free charge but do not pay the cost of freight. Q: What is your terms of payment ? A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.
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