China PVD Vacuum Coating Machine manufacturer
SHANGHAI ROYAL TECHNOLOGY INC.
LIVE LOCALLY, THINK GLOBALLY
8
Home > Products > Cathodic Arc Deposition Equipment >

Copper Circuit Board TiN Coating Machine , MF Magnetron Sputtering System

Copper Circuit Board TiN Coating Machine , MF Magnetron Sputtering System

Brand Name ROYAL
Model Number RTSP1215-MF
Certification ISO, CE, UL Standard
Place of Origin Made in China
Minimum Order Quantity 1 set
Price negotiable
Payment Terms L/C, D/A, D/P, T/T
Supply Ability 15 sets per month
Delivery Time 8 to 12 weeks
Packaging Details Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Vacuum Technology MF Magnetron Sputtering, Ion Source Plasma Cleaning
Deposition Sources Sputtering Cathodes
Coating Films Metal film plating, Titanium Nitride, Titanium Carbide, Zirconium Nitride, Chromium Nitride, TiAlN, CrC
Industrial Applications Electronics module, Circuit board, hard coatings, PVD decorations
Deposition Chamber 8-sides chamber
Factory Location Shanghai city, China
Worldwide Service Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America
Training Service Machine operation, maintenance, coating process Recipes, program
Warranty Limited warranty 1 year for free, whole life for machine
OEM & ODM available, we support tailor made design and fabrication
Detailed Product Description

Copper Circuit Board TiN PVD Coating Machine / PVD TiN Decorations Plating on Brass Board

 

 

The PVD machine model: RTSP1215-MF is designed and developed to deposit TiN gold coating on Copper circuit board. The TiN thin film generated in high vacuum environment, which highly enhanced the uniformity and purity.

 

Copper Circuit Board TiN PVD Coating Machine design features:

1. 8-sides chamber with equal sizes mounting flanges, which can assemble and exchange Ion source and Sputtering cathodes or Arc cathodes flexiblely based on the coating processes demand.

2. Compact design which only occupy 20sqm;

3. Ion source for plasma cleaning pre-treatment and Ion-beam assisted deposition to enhance the film adhesion.

4. High pumping speed package and stable configuration, the magnetically suspension molecular pumps can be mounted in any direction.

 

 

Copper Circuit Board TiN PVD Coating Machine Specifications

 

Performance

1. Ultimate Vacuum Pressure: better than 5.0×10-6 Torr.

2. Operating Vacuum Pressure: 1.0×10-4 Torr.

3. Pumpingdown Time: from 1 atm to 1.0×10-4 Torr≤ 3 minutes ( room temperature, dry, clean and empty chamber)

4. Metalizing material (sputtering + Arc evaporation): Ni, Cu, Ag, Au, Ti, Zr, Cr etc.

5. Operating Model: Full Automatically /Semi-Auto/ Manually

 

Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber

2. Rouhging Vacuum Pumping System (Backing Pump Package)

3. High Vacuum Pumping System ( Magnetically Suspension Molecular Pump)

4. Electrical Control and Operation System

5. Auxiliarry Facility System (Sub System)

6. Deposition System

 

RTSP1215-MF Technical Data
MODELRTSP1215-MF
TECHNOLOGYMagnetron Sputtering (MF)
MATERIALStainless Steel (S304)
CHAMBER SIZEΦ1200*H1500mm
CHAMBER TYPE8-sides, vertical, 1-door
SPUTTERING SYSTEM4 sets Planar Sputtering Cathodes
DEPOSITION MATERIALAluminum, Silver, Copper, Chrome, Stainless Steel, Nickel, Titanium, TiN
DEPOSITION SOURCE4 Planar Sputtering Cathodes + Ion Source for Plasma cleaning
GASMFC- 2 ways, Ar, N2
CONTROLPLC(Programmable Logic Controller) +
Touch Screen
PUMP SYSTEMSV300B - 1 set (Leybold)
WAU1001 - 1 sets (Leybold)
D60T- 1 set (Leybold)
MGK3304 - 2 sets ( Osaka)
PRE-TREATMENTBias power supply: 1*36 KW
SAFETY SYSTEMNumerous safety interlocks to protect operators
and equipment
COOLINGCold Water
POWER ELECTRICAL480V/3 phases/60HZ ( USA compliant)
460V/3 phases/50HZ ( Asia compliant)
380V/3 phases/50HZ ( EU-CE compliant)
FOOTPRINTL3000*W3000*H2000mm
TOTAL WEIGHT7.0 T
FOOTPRINT( L*W*H) 5000*4000 *4000 MM
CYCLE TIME30~40 minutes (depending on substrate material,
substrate geometry and environmental conditions)
POWER MAX..110KW
AVERAGE POWER CONSUMPTION (APPROX.)50 KW
 

 

 

 

 

Copper Circuit Board TiN PVD Coating Sample

 

 

 

 

 

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Product Tags: tin coating machine   titanium coating machine  
Related Products
Email to this supplier
 
From:
Enter your Email please.
To: SHANGHAI ROYAL TECHNOLOGY INC.
Subject:
Message:
Characters Remaining: (80/3000)