China PVD Vacuum Coating Machine manufacturer
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Tantalum Sputtering Coating Machine

Tantalum Sputtering Coating Machine

Brand Name ROYAL
Model Number RTSP
Certification CE
Place of Origin China
Minimum Order Quantity 1 set
Supply Ability 10 sets per month
Delivery Time 14~16weeks
Packaging Details Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Technology Arc ion plating + PVD sputtering deposition
Targets TiAl, Ta, Ni, Cr, Ti, Au, Ag, SS, Cu, Zr, Al etc.
Properties High Yield, High uniformity, high target utilization
Application Multiple layer films deposition
Advantages Environmentally friendly operating process
Factory Location Shanghai city, China
Worldwide Service Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America
Training Service Machine operation, maintenance, coating process Recipes, program
Warranty Limited warranty 1 year for free, whole life for machine
OEM & ODM available, we support tailor made design and fabrication
Detailed Product Description

                 Tantalum PVD Sputtering Coating Machine, Tantalum films deposited by DC Magnetron Sputtering, PVD Tantalum Plating

 

Tantalum is most widely used in the electronic industry and as a protective coating in many industries because of its good resistance to erosion.

 

Sputtered tantalum films are widely used in the
1.  Microelectronics industry as the films can be reactively sputtered and thus resistivity and temperature coefficient of resistance can be controlled;

2. Medical instruments like body implants for its highly biocompatability property; 

3. Coatings on corrosion resistant parts, such as thermowells, valve bodies, and fasteners;

 

 

Sputtered tantalum can be also be used as an effective corrosion resistance barrier if the coating is continuous, defectected  and is adherent to the substrate is intended to protect

 

RTAS1000 Technical Advantages

 

1. Plug-in Integrated design system for quick installation

2. Siemens PLC,CPU; with Industrial PC operation & control hardware

3. Available for remote monitoring and diagnosis.
4. Flexible, ready for upgrading

5. Multiple cathodes for fast deposition speed

 

More benefits from the machine:

 

 Robust Design, Stable Quality, Fast Cycle,  Fast Cycle Time, High deposition speed

 

Main Configurations
MODELRTAS1000
TECHNOLOGYDC magnetron sputtering + Cathodic arc plating
CHAMBER MATERIALStainless Steel (S304)
CHAMBER SIZEΦ1000*1000mm (H)
CHAMBER TYPED shape, cylindrical chamber
ROTATION RACK & JIG SYSTEMSatellite driving or central driving system
POWER SUPPLIESDC Sputtering Power Supply: 2~4 sets Bias Power supply: 1 set Arc Power supply: 11 sets
DEPOSITION MATERIALTi/Cr/TiAl, Ta, Au, Ag, Cu etc.
DEPOSITION SOURCE

Planar Sputtering Cathodes + circular arc cathodes

Remark: cylinderial DC sputter is avaliable

CONTROLPLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models)
PUMP SYSTEMRotary Vane Pump: SV300B - 1 set (Leybold)
Roots Pump: WAU1001 - 1 set (Leybold)
Holding Pump: D60C - 1 set (Leybold)
Magnetic Suspension Molecular Pump: MAG2200 - 2 sest (Leybold)
GAS MASS FLOW CONTROLLER4 channels, Made in China, Seven Star (CS series, ) digital model (Ar, N2, O2, C2H2)
VACUUM GAUGEModel: ZDF-X-LE, Made in China
SAFETY SYSTEMNumerous safety interlocks to protect operators and equipmen
HEATINGHeaters: 20KW. Max. temp.: 450℃
COOLINGIndustrial Chiller (Cold Water)
POWER MAX.100KW (Approx.)
AVERAGE POWER CONSUMPTION45 KW (Approx.)
GROSS WEIGHTT (Approx.)
FOOT PRINT( L*W*H) 4000*4000 *3600 MM
POWER ELECTRICALAC 380V/3 phases/50HZ / 5 line

 

 

 

Cylindrical sputtering cathodes                                   Planar sputtering cathodes 

 

     

 

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

 

Download the brochure, please click here:  Magnetron Sputtering Deposition System.pdf
                                                                          Magnetron Sputtering Deposition system applicatio...

 

Product Tags: vacuum coating plant   high vacuum coating machine  
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