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Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

Brand Name ROYAL
Model Number RTAS950
Certification ISO, CE, UL standard
Place of Origin Made in China
Minimum Order Quantity 1 set
Price negotiable
Payment Terms L/C, D/A, D/P, T/T
Supply Ability 6 sets per month
Delivery Time 12 weeks
Packaging Details Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Deposition Sources Sputter + Ion source PECVD process
Technique PVD, Balanced/Unbalanced Magentron Sputtering Cathode
Applications DLC, Hard films, optical film coating by Magnetron Sputtering
Factory Location Shanghai city, China
Worldwide Service Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America
Training Service Machine operation, maintenance, coating process Recipes, program
Warranty Limited warranty 1 year for free, whole life for machine
OEM & ODM available, we support tailor made design and fabrication
Detailed Product Description

 

 

DLC hard coating machine / DLC PECVD coating equipment / Diamond like Carbon vacuum PVD coating system

 

DLC coatings: self-lubricating and anti-friction diamond-like coatings

Diamond-like-Carbon coatings are used in demanding automotive, non-ferrous material machining and industrial engineering environments where component surfaces are subjected to high contact pressure, intermittent lubrication or dry sliding and rolling environments where severe abrasive and adhesive wear conditions exist. DLC coatings are also commonly applied onto various medical and dental instruments and implants to provide a dark black, anti-reflective and bio-compatible surface with enhanced tribological protection properties.

This machine is suitable to the industrial production vacuum coating system. It equips a big size plain arc ion evaporation source and can deposite high performance hard metal film by arc evaporation technology, such as TiN, TiCN,AlTiN and all kinds of other special film according to customer’s requirements.
DLC coating (diamond-like carbon) is the combination of diamond (SP3) and graphite (SP2). The physical and chemical properties of DLC are intermediate to that of diamond and graphite


DLC coatings properties

  • Strong adhesion of the deposited films to the surface;
  • Hardness of the coating comparable to diamond hardness;
  • Durability;
  • Low coefficient of friction;
  • Chemical stability;
  • Ecological cleanliness;
  • Biological compatibility;
  • Transparency in the infra-red band of the spectrum;
  • High heat conductivity;
  • Corrosion resistance;
  • High electrical resistance

DLC coatings on sealing parts:

 

 

DLC Thin Film Coating Machine Specifications

 

MODELRTSP800
TECHNOLOGYPECVD process- magnetron sputtering + ion source
CHAMBER MATERIALStainless Steel (S304)
CHAMBER SIZEΦ800*800mm (H)
CHAMBER TYPERegular octahedron chamber, 2-doors
ROTATION RACK & JIG SYSTEM6 (8)satellite, Max. weight: 400kgs
POWER SUPPLIESQty. of Sputtering: 2*24 KW Bias of Power Supply: 1*24W AE power supply for option Ion Source Power supply 2 sets, AE power supply for option
DEPOSITION MATERIALCr/C
DEPOSITION SOURCE

2 pairs (4 pieces) Sputtering Cathodes + 2 Ion Source Coating Area: Dia800mm*H550mm;

Uniformity Area: ±10~15%

CONTROLPLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models)
PUMP SYSTEMRotary Vane Pump: SV300B - 1 set (Leybold)
Roots Pump: WAU1001 - 1 set (Leybold)
Holding Pump: D60C-1set- (Leybold)
Magnetric Rotor Suspension Molecular Pump: MAG2200 - 2 sets (Leybold)
GAS MASS FLOW CONTROLLER3 channels, Made in America (MKS brand)
VACUUM GAUGEModel: ZDF-X-LE, Made in China
Linear Ion Source2 pieces Pre-treating, plasma cleaning + assisted deposition
SAFETY SYSTEMNumerous safety interlocks to protect operators and equipment
HEATINGHeaters: 20KW. Max. temp.: 400℃
COOLINGIndustrial Chiller (Cold Water)
POWER MAX.100KW (Approx.)
AVERAGE POWER CONSUMPTION45 KW (Approx.)
GROSS WEIGHTT (Approx.)
FOOT PRINT( L*W*H) 4000*4000 *4000 MM
POWER ELECTRICALAC 380V/3 phases/50HZ

 

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Product Tags: vacuum coating plant   high vacuum coating machine  
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