Direct Plating Copper PVD Coating Machine on AlN, Al2O3 chips

DPC1215+  contains deposition sources are: steered arc cathodes; MF sputtering cathodes with balanced/unblanced magnetic closed filed; Ion source device as an important device to generate plasma filed which highly enchance the film adhesion. We have developed exclusively Ion source unit or use Gencoa company's product.

1. It can deposit a veriety of pure metal films and alloy films. If the vacuum chamber through a veriety of reactive gases, and can coating various compounds film. It has been applied not only on the lighter but to the construction and daily necessities decoration plating (imitation gold plated, plating a veriety of colors,....), mechanical tool coatings, anti-corrosion coatings in nuclear industry, solid lubricating coatings in the aerospace industry as well as other coatings of various funcational coatings.

2. Advantage: High deposition rate, High ionization rate, Easy operation, High productivity and Low cost. No waste gases and water.Magnetron sputtering stably at low temperature.

3. Operation Modes:

(1) Semi-automatic/Automat

(2) Automatic bombardment

(3) Accurate control of various process time

4. Coating colors: Gold, Rose gold, Black gold, Coffee, Silver, Champagne gold, Multicolor, etc.

5. Coating films: titanium nitride film, titanium carbide film, zirconium nitride film, titanium aluminum film,

chromium nitride, and other superhard functional metal film ( the workpiece coated by ion coating machine can improved hardness, wear resistance, anti-corrosion and more beautiful.)

6. Coating Film properties: Strong adhesion , good compactness, well repeatability and consistence of color

PVD Coating Equipment Models

 Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.