AlN Chips Copper Sputtering Depostion System, Aluminum Nitride Copper Direct Plating Machine

AlN Chips Copper Sputtering Depostion System, Aluminum Nitride PVD Copper Sputtering Machine

Performance

1. Ultimate Vacuum Pressure: better than 5.0×10^-6 Torr.

2. Operating Vacuum Pressure: 1.0×10^-4 Torr.

3. Pumpingdown Time: from 1 atm to 1.0×10^-4 Torr≤ 3 minutes ( room temperature, dry, clean and empty chamber)

4. Metalizing material (sputtering + Arc evaporation): Ni, Cu, Ag, Au, Ti, Zr, Cr etc.

5. Operating Model: Full Automatically /Semi-Auto/ Manually

Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber

2. Rouhging Vacuum Pumping System (Backing Pump Package)

3. High Vacuum Pumping System ( Magnetically Suspension Molecular Pump)

4. Electrical Control and Operation System

5. Auxiliarry Facility System (Sub System)

6. Deposition System

Copper Sputtering Coating Machine Key Features

1. Equipped with 8 steer arc cathodes and DC Sputtering Cathodes, MF Sputtering Cathodes, Ion source unit. 

2. Multilayer and co-deposition coating available

3. Ion source for plasma cleaning pre-treatment and Ion-beam assisted deposition to enhance the film adhesion. 

4. Ceramic/ Al2O3/AlN substrates heating up unit; 

5. Substrate rotation and revolution system, for 1-side coating and 2-sides coating. 

Cooper Magnetron Sputtering Coating Plant on Ceramic Radiating Substrate  

The DPC process- Direct Plating Copper is an advanced coating technology applied with LED / semiconductor / electronic industries. One typical application is Ceramic Radiating Substrate. 

Cooper conductive film deposition on Al2O3, AlN substrates by PVD vacuum sputtering technology,  compared with traditional manufacturing methods:  DBC  LTCC  HTCC, much lower production cost is its high feature. 

Royal technology team assited our customer to developed the DPC process sucessfully with PVD sputtering technology. 

The RTAC1215-SP machine designed exclusively for Copper conductive film coating on Ceramic chips, ceramic circuit board. 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.