Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror
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SiC Mirror Introduction
Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror
A Small-Size Double-Side Polished Silicon Carbide (SiC) Mirror is a high-performance optical component manufactured from ultra-high-purity silicon carbide (SiC) ceramic through precision machining and double-side polishing (DSP) technology. Its core features include compact dimensions (typically ≤50mm in diameter or side length) and nanoscale surface finish on both sides, specifically designed for modern high-end optoelectronic systems with extreme requirements for size, weight, stability, and optical precision. Leveraging the inherent properties of silicon carbide—ultra-high hardness, high stiffness, low thermal expansion, high thermal conductivity, and exceptional chemical stability—it is produced via processes such as reaction sintering, chemical vapor deposition (CVD), or pressureless sintering. The implementation of double-side ultra-precision polishing (surface roughness Ra typically ≤0.5 nm) enables it to serve as a core component in many compact precision optical devices.
SiC Mirror Characteristic1. Ultra-Lightweight & Miniaturization:
2. Superior Stability & Environmental Resistance:
3. Excellent Thermal Management:
4. Top-Tier Optical Surface Quality:
5. Outstanding Durability & Chemical Inertness:
SiC Mirror Application ScenarioSmall-size double-side polished SiC mirrors are critically used in
the following high-end fields due to their unique advantages:
AR/MR Glasses Optical Systems: As diffractive waveguide lenses, prisms, or reflectors for guiding and displaying light paths. Their high refractive index (~2.65), lightweight, and small size are key to achieving slim glasses design, large field of view (FOV), and elimination of rainbow patterns.
As reflectors or lens substrates in the illumination systems of lithography machines or sensors of wafer inspection equipment. Their high thermal stability and flatness are crucial for maintaining nanoscale overlay accuracy and inspection precision.
Used in laser galvanometers, laser interferometers, or as reflectors/window mirrors in high-power lasers. Their high damage threshold, high thermal conductivity, and stability ensure precise laser beam steering and long-term stable system operation.
As substrate materials for MEMS micromirrors or substrates for micro-optical devices, applied in LiDAR, projectors, etc., meeting stringent requirements for high-frequency response, high stability, and miniaturization. SiC Mirror Key Material & Performance Parameters
ZMSH's SiC Ceramic Products
2. SiC Ceramic Vacuum Chuck Flip-Chip Bonding Mirror Polishing High-Stiffness
SiC Mirror FAQ
1. Q: How do SiC mirrors work in optics? A: SiC mirrors function by leveraging silicon carbide's extremely low thermal expansion coefficient (~4.5×10⁻⁶/℃), high thermal conductivity (~120–200 W/m·K), and high stiffness (>400 GPa) to maintain nanoscale surface stability under extreme temperatures and mechanical stress, ensuring minimal distortion in high-precision optical systems like space telescopes or EUV lithography equipment.
A: Silicon carbide (SiC) mirrors excel in extreme environments due to their extremely low coefficient of thermal expansion and exceptional thermal stability. For instance, in space applications, they operate reliably across a temperature range from -60°C to 180°C. In automotive LiDAR systems, where engine compartment temperatures can exceed 125°C, SiC mirrors maintain minimal surface deformation. Additionally, their high hardness (Mohs hardness of 9.5) and superior chemical inertness enable effective resistance to vibration, impact, and corrosion from acids or alkalis, ensuring long-term stability under harsh conditions.
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| Product Tags: Double-side polished SiC mirror High-purity SiC optical component SiC substrate for MEMS micromirror |
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