Pump station FJ-620 Air Cooling with RVP-6 and ZDF-11A2
FJ-620 standard Turbo Molecular Pump Unit is an cleaning
equipment to obtain high vacuum.
Such equipment is a vacuum obtaining system adopting the principle
of vacuum, and consists of mechanical pump and molecular pump. It
is featured by quick starting, high vacuum, few oil pollution, easy
operation and etc and widely used in the fields of surface
analysis, accelerator technology ,plasma technology, electric
vacuum device manufacturing and other vacuum areas. The equipment
is specifically composed of non-standard frame, mechanical pump and
pipelines , electrical control systems, water cooling protection
control and etc
Configurations:
| Name | Number |
| F-160/620 molecular pump and power supply | 1 |
| RVP-6 mechanical pump | 1 |
| Frame | 1 |
| Control power supply | 1 |
| ZDF-11A2 combination vacuum gauge | 1 |
| Other attachments | |
Main Parameters:
Leaking rate of vacuum system: ≤ 1×10-9Pa·m3/S
Power supply voltage: 380V±10/50Hz
Cooling mode: air cooling
Ambient temperature for equipment utilization: 5-40℃
Ambient humidity for equipment utilization: ≤ 80%
Specifications:
| | Unit | FJ-620F |
| Flange(In) | | DN160 CF |
| DN160 ISO-K |
| Flange(Out) | ISO-KF | DN40 |
| Pumping Speed | l/s | N2:600 |
| He:380 |
| H2:240 |
| Ar:580 |
| Compression Ratio | | N2:109 |
| He:105 |
| H2:104 |
| Ar:109 |
| Ultimate Pressure | Pa | CF:6×10-8 |
| ISO-K:6×10-7 |
| recommended forevacuum pressure | Pa | 100 |
| forevacuum pump | | RVP-6( default ) |
| Cooling Type,Standard | | Air |
| Cooling Water Consumpyion | L/min | >1 |
| Cooling Water Temperature | ℃ | ≤25 |
| Input voltage/ frequency | V/Hz | 380±20/50 |
| Environment temperature (℃) | Water cooling | 5℃-40℃ |
| Air cooling | 5℃-32℃ |
| mounting position | | Vertical |
| Controller Model | | FD-ⅡB/TCDP-Ⅱ |
| L*W*H | mm | 550×690×956(LF) |
| | 550×690×970(CF) |
| Weight | kg | 117 |
