RDE 530L CVD Coating Machine With Two Reaction Chambers And Heating Elements
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RDE 530L CVD Coating Machine With Two Reaction Chambers And Heating Elements
1. Equipment Strengths
1.1 Automatic Mode. According to the process settings, the individual components and processes are automatically controlled. Automatic control includes valve switch, process gas flow control, process liquid flow control, reactor pressure control, heating furnace and electric heating belt temperature control, etc., without human intervention in the whole process. The automatic operation process realizes automatic alarm processing. According to different alarm types, it will automatically enter the alarm mode to protect the products in the furnace. After the alarm is released, it can be manually restored to the state before the alarm. 1.2. The process is monitored throughout the process, all sensor data and valve status are saved to historical data, which can be viewed at any time. 1.3. Manual mode. There is a safety interlock, which automatically realizes the lock according to the gas type and temperature inside the reactor, and the reactor cannot be opened at will. The manual mode is set with one-button operation, such as vacuuming, H2 purge, N2 purge, etc., no need to manually move individual valves and vacuum pumps. 1.4. The alarm data is automatically saved, and the historical data can be retrieved at any time.
2 Main technical parameters 1. Power supply voltage: 380V 50HZ; 2. Maximum temperature: 1100°C; 3. Working temperature: 900-1050°C; 4. Total power: about 75KW; 5. Heating power: about 55KW; 6. Number of reaction chambers: 2 7. Effective size of reaction chamber: φ500 (inner diameter)
mm×1500 (effective height) mm; 8. Occupation size (l×w×h) : 8100×7000×5100mm; 9. Equipment weight: about 10T For more details, please email us or call us at +86-16673365810. |
| Product Tags: Two Chambers CVD Coating Machine RDE 530L CVD Coating Machine CVD Automatic Coating Machine |
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