High Temperature & Pressure Sintering Furnace For Ceramic Wafer
Equipment system
It mainly includes control system, heating system, positive and
negative pressure debinding system,vacuum system, pressure
sintering system, cooling water system, rapid cooling system,
safety system and auxiliary system.
Design standards:
The ceramic sintering integrated furnace is a single-chamber and
double -door horizontal, cyclic heating structure designed for easy
handling and maintenance, the whole process is controlled
automatically with safety interlock. Full load continuous operation
is realized with its maximum ability of 300 furnace times/year or
300 working days/year. Adopting graphite element resistance heating
(low voltage, high current) with multiple heating units, each unit
of temperature is individually controlled ; The whole process is
controlled by computer automation, monitoring, tracking, fault
self-diagnosis simulation display and record. The process is
controlled by PLC and industrial control machine (IPC) to realize
the one-key start-up of the whole process, real-time dynamic
monitoring, temperature, pressure, vacuum and other parameters
saving and reliable alarm interlock.
| Furnace Type | Horizontal type(Max Working pressure:58bar/98bar) | Vertical type (Max Working pressure:58bar/98bar) | | RDE-3312-N | RDE-4412-N | RDE-5512-N | RDE-5518-N | RDE-1500-N | RDE-3800-N | | Usable Space (W*H*L) | 300*300*1200mm | 400*400*1200mm | 500*500*1200mm | 500*500*1800mm | Φ1000*1500mm | Φ3250*3800mm | | Max.Charge Load | 300kg | 500kg | 1200kg | 1500kg | 1000kg | 4000kg | | Power Rating | 320KVA | 320KVA | 430KVA | 600KVA | 500KVA | 720KVA | | Heating Zone | 2/3 Zones | 3 Zones | 3 Zones | 3 /4 Zones | 4 Zones | 6 Zones | | Cooling time | ≤5h | ≤6h | ≤7h | ≤8h | ≤10h | ≤12h | Empty furnace, cooling from sintering temperature 2100℃ to 100℃. (water temperature≤26℃, water pressure 2-3bar, 55bar(95bar)≤Ar
pressure≤58bar(98bar). | | Service Life | 20years/6000furnace cycles | | Max. Working Temp | 2100℃ | | Temperature Measurement | Special design High temperature W-Re5/26 Thermocouple | | Max Vacuum Degree | 1Pa (under cold, empty, dry furnace) | | Leakage Rate | 3Pa/h (Average value under cold, empty, dry furnace) | | Wax Collection | ≥98%(Argon gas negative dewaxing, 3-time average value) | | Forming Agent | Paraffin,PEG,Rubber,(C12H22O5)n etc. | | Input gas | N2, Ar, H2 | | Functions | Automatic Positive Pressure, Negative Pressure Leak Detection
Ar Negative Pressure Dewaxing/H2 Micro Positive Pressure Dewaxing
Vacuum Sintering
Partial Pressure Sintering (Static, Dynamic)
Pressure Sintering
Rapid Cooling
Fully-automatic control & Safety interlock& Breakpoint
continuing heating & Wireless remote control&
Self-diagnosis |
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