UV/IR Grade Quartz Through Hole Plates Custom Cut High Temperature Chemical

Overview

Quartz plates with through-holes are engineered components fabricated from high-purity silica glass, available in custom dimensions and complex geometries. These shaped quartz substrates are designed to support high-performance applications in optics, microfluidics, vacuum systems, and high-temperature manufacturing.

The integrated holes allow for beam alignment, gas flow, fiber feedthroughs, or mounting functions. The plates are offered in various material types to match spectral and thermal needs.

Quartz Material Types Explained

• JGS1 (UV-Grade Quartz):
  Best for applications in excimer laser optics, UV lithography, and DUV detection. Superior transmission down to 185 nm.

• JGS2 (Standard Optical Quartz):
  Balanced cost and performance in the 260–2500 nm range. Suitable for imaging systems and general photonics.

• JGS3 (Infrared Quartz):
  Higher OH⁻ content, better thermal shock resistance. Ideal for high-heat environments, not suitable for UV-critical tasks.

How They’re Made

Laser drilling is a high-precision, non-contact method used to create holes in fused quartz glass by focusing a concentrated laser beam on the material surface. The intense energy of the laser rapidly heats and vaporizes the quartz, forming clean holes without causing cracks or mechanical stress.

This technique is especially suitable for microholes (as small as 10 microns), high-density patterns, and fragile quartz components. Femtosecond or picosecond lasers are commonly used to minimize heat-affected zones and achieve smooth edges with excellent accuracy.

Laser drilling is widely applied in microfluidics, semiconductors, optics, and advanced scientific instruments that require precision and reliability.

Use Cases

Drilled fused quartz glass, featuring precision microholes, through-holes, or complex patterns, is widely used in high-tech industries due to its outstanding thermal stability, optical transparency, and chemical resistance. The ability to introduce custom hole geometries expands the material’s functionality, making it a key component in numerous advanced applications.

1. Semiconductor Processing

Drilled quartz substrates are used in:

• Wafer carriers, susceptors, and showerheads with precise gas flow holes

• Plasma etching and CVD systems, where uniform gas distribution is critical

• Custom-designed quartz parts for photolithography and ion implantation chambers

2. Microfluidic Devices

Fused quartz with microholes is ideal for:

• Lab-on-a-chip systems for chemical and biological analysis

• Capillary electrophoresis or sample injection interfaces

• BioMEMS (biomedical microelectromechanical systems) where transparency and biocompatibility are required

3. Optics & Photonics

Quartz’s high UV and IR transmission makes it valuable in:

• Laser systems with aligned pinholes or apertures

• Optical masks, beam splitters, and lens arrays with drilled features

• Spectroscopy windows with gas or fluid injection ports

4. High-Temperature and Vacuum Systems

Drilled quartz components are used in:

• Vacuum chambers with electrode feedthroughs or fluid inlets

• High-temperature furnaces or thermal reactors requiring quartz tubing or plates with sealed holes

• Quartz ampoules or cells used for thermal analysis or gas reactions

5. Chemical and Pharmaceutical Industry

Quartz's chemical inertness makes it perfect for:

• Reaction vessels with sample or sensor ports

• Flow-through reactors

• Corrosive fluid sampling systems

6. Aerospace and Defense

Specialized quartz parts with precision holes are used in:

• Sensor housings

• Optical targeting components

• High-speed diagnostic windows

7. Scientific Research & Custom Labware

Many universities and research institutions use drilled quartz glass in:

• Experimental setups requiring both chemical resistance and thermal tolerance

• Custom reaction cells, vacuum flanges, or window mounts

• X-ray and neutron beamline components

FAQ

Q1: Do you offer double-side polishing for these plates?
A1: Yes, both single-side and double-side polished finishes are available for optical alignment and bonding applications.

Q2: What’s the typical thickness range?
A2: Standard thickness is 0.5–10 mm, but custom thicknesses are available upon request.

Q3: Can you process complex shapes like notches or slots?
A3: Yes. We can fabricate complex contours including keyways, curved edges, or hybrid geometries.

Q4: Is JGS3 suitable for laser use?
A4: JGS3 can be used with IR lasers but is not suitable for deep-UV laser optics due to lower transmission.

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