Description of oxygen Flow Sensor Gas Flow Sensors FS6122 Mass Air
Flow Meter
FS6122series mass flow sensors are specially designed for persona
lventilators for CPAP (continuous positive air way pressure). The
sensorinte grates MEMS massflow sensor with a MEMS pressure sensor
that provides the necessary information for the proper performance
of the state-of-the-art CPAP ventilators. The miniature
package notonly provide space saving for the ventilat or butalso
provides high accuracy and fast response for both mass flow rate
measurement and gauge pressure data while with a very low pressur
edropand small dead space.
Features of oxygen Flow Sensor Gas Flow Sensors FS6122 Mass Air Flow Meter
! Measures mass flow rate and gauge pressure
! Fast response time
! Highly sensitive in small flow rate
! Low power consumption
! Specially designed for medical equipment
Detailed Images of oxygen Flow Sensor Gas Flow Sensors FS6122 Mass Air Flow Meter
Specification of oxygen Flow Sensor Gas Flow Sensors FS6122 Mass Air Flow Meter
| Medical CPAP Sensor Fusion, oxygen Flow Sensor, Mass Air Flow Meter |
| Parameter | FS6122 | Unit |
| Flow Range | - 250 ~ +250 | SLPM |
| Accuracy(Total Error Band) | ±(2.5+0.5FS) | % |
| Output** | Linear, Analog/I2C (14 bit) |
| Analog Output Range | 0.5 ~ 4.5 | Vdc |
| Response Time | 2 | ms |
| Pressure Sensor |
| Pressure Type | Gauge |
| Pressure Range | -5 ~ +40 / -5 ~ +100 | cmH2O |
| Accuracy | ±1.0 | %FS |
| Output** | Linear, Analog/I2C (14 bit) |
| Analog Output Range | 0.5 ~ 4.5 | vDC |
| Update Time | <1 | ms |
| Temperature and Humidity Sensors |
| Temperature Range | -10 ~ +60 | ℃ |
| Temperature Accuracy | ±0.5 | ℃ |
| Humidity Range | 0 ~ 100 (No Icing or condersation | %RH |
| Humidity Accuracy | ±2.0 (20 ~ 80%RH; ±5.0 max (other ranges) | %RH |
| Humidity Resolution | 0.7 | %RH |
| Humidity Response time (63%) | 5.0 (25 ~ 75%RH) | sec |
| Humidity Stability | 0.5 | %RH/year |
| Other Specifications |
| Gas Type | Air |
| Supply Voltage | 5.0 ± 5% | Vdc |
| Output Pin Shape | 6 Pins, NS-TECH CD R-6 |
Note: * The above parameters are applicable at 20℃ and 101.325kPa;
** 14 bit for I2C.
*** Base on the working pressure of the pressure sensor.
Mechanical Dimensions of oxygen Flow Sensor Gas Flow Sensors FS6122 Mass Air Flow Meter
Production Selection of oxygen Flow Sensor Gas Flow Sensors FS6122 Mass Air Flow Meter
