CE Certificated Vacuum Helium Leak Detector Machine For Semiconductor Industry

SFJ-16M Helium Leak Detector

Performance Indicators






 

Minimum detectable leak rate
(Pa·m³/s)/ vacuum mode

Vacuum Mode (ULTRA):5.0×10^-13 Pa·m³/s (helium pumping speed >5 l/s)
Vacuum mode (FINE):1.0×10^-12 Pa·m³/s (helium pumping speed 2.5L/s)

Minimum detectable leak rate
(Pa·m3/s)/ sniffer mode

5.0×10^-8 Pa·m³/s

Response time(s)

<1

Startup time(min)

≤95s

Leakage detection range
(Pa·m³/s)

5.0×10^-13~1.0×10^-3 Pa·m³/s

Leakage rate display range
(Pa·m³/s)

1.0×10^-13~1.0×10^-3 Pa·m³/s

Maximum allowable leak detection pressure(Pa)

1500

Detectable quality

2,3,4(H2 , He3, He4)

Basic Configuration










 

Man-machine interface

5 "color LCD Touch Screen

Ion source

2pcs, iridium coated yttrium oxide, automatic switching

I/O Input/output interface

Eight inputs and eight outputs

Communication interface

RS232/485,LAN

MES interface

Standard

Physical size of instrument
(W)×(D)×(H),mm

592 * 498 * 370mm

Specifications of leak detection port

DN16 KF/2pcs

Power Supply

DC24V

Operating temperature

0-40ºC

Power

240W

Display language

Both Chinese and English

Leakage rate display

Figure, bar chart, curve chart