MTCS-2601 Micro Thermal Conductivity Sensor for Gas Detection

MTCS-2601 Micro Thermal Conductivity Sensor for Gas Detection

Applications
Applications are primary industrial process control (binary mixture), horticulture and
food storage (CO2), security (CO2 monitoring, fire alarm, H2), natural gas engine or hydrogen engine full cell,
detection of refrigerant. This type of device is also used as leakage detection as well as
pressure sensor for primary vacuum control following Pirani principle.

Features
• Robust MEMS physical sensing principle with no chemical reaction, based on
gas thermal conductivity variation
• Measuring range from 100 ppm to 100% depending on the application and
the thermal conductivity of the gas
• No chemical reactants, linear signal with concentration without hysteresis
• Temperature compensated with excellent matching of compensation and
heating resistors on the same silicon die
• Ultra small sensor gas volume such as < 0.1 cm3
• Robust and long MTBF due to physical resistive sensing principles, High
shock survivability (>1000 G)
• Ultra-low power sensor consumption in operation (< 8mW) due to the use of
MEMS based silicon sensor with large integrated resistors such as 250 Ohms
and small heated mass.
• Ultra-fast response time < 50 ms with large electronics bandwidth