An online basket spray cleaning machine developed
specifically for cleaning semiconductor products TW-CL360
The online basket spray cleaning machine is a device
developed specifically for cleaning semiconductor products. The
equipment has unique rotating spray and multi slot vibration
rinsing functions, and each cleaning section is equipped with
precision filtering devices. FFU filters are installed on the top
of the machine, ensuring overall cleanliness during machine
operation.
The online basket spray cleaning machine is a device
developed specifically for cleaning semiconductor products. The
equipment has a unique rotating spray and multi slot vibration
rinsing function. The workpiece is transported by a mechanical arm
to each section for cleaning, rinsing, and drying before being sent
out. Each section is equipped with precision filtering devices, and
FFU filters are installed on the top, as well as various
instruments to ensure the safe operation of the machine, such as
resistivity meters, temperature meters, and pressure gauges
The equipment operation is simple, just press the start
button, and all processes are automatically completed by the
machine according to the predetermined program.
Process Flow Diagram
Feed Spray cleaning Oscillating rinsing Oscillating rinsing Discharge
| Serial Number | production processes | beat | Cleaning medium | notes |
| 1 | Entering the board | / | / | Dockable,upstream equipment (standard MES interface) |
| 2 | Spray cleaning | 1-5min | DI water/cleaning agent | Rotating spray cleaning inside the chamber |
| Cold air cutting water | 1-5min | compressed air | Rotary drying inside the chamber |
| 3 | Vibration rinsing | 1-20min | DIwater/cleaning agent | Rinsing,workpiece vibrates up and down simultaneously |
| 4 | Vibration rinsing | 1-20min | DIwater | Rinsing,workpiece vibrates up and down simultaneously |
| 5 | Output board | / | / | Dockable downstream equipment (standard MES interface) |
