Rapid Multi-layer Semiconductor Inspection Equipment——X8800（3D/CT)

X-ray source

Type

Open, microfocus

Max tube voltage

160kV

Max tube current

500μA

Target power

15W

Tube power

65W

Focal spot size

1μm

Flat panel detector

Effective area

130mm*130mm

Pixel size

49.5μm

Resolution

1536*1536

Frame rate

20fps

Tiltable angle

60°

Rotation angle

360°

Table

Size

400mm*400mm

Detectable area

400mm*400mm

Max load

10kg

Equipment

Geometry Magnification

2500X

Inspection speed

Max 3.0s/point

Dimensions

1550mm (L) * 1600mm (W) * 1700mm (H)

Weight

1800kg

Power supply

AC110-220V 50/60HZ

Max power

1800W

Industrial PC

I7 CPU,16G RAM, 240GB SSD+1TB HDD

Displayer

24” HDMI LCD

Safety

Radiation leakage

No leakage, international standard: ≤1μSv/h

Lead glass observation window

Transparent lead glass window shields radiation to observe the inner status.

Window and back door safety interlock

Once users open the window or back door, X-ray tube will power off immediately. When the window or back door is open, users can’t turn on the X-ray.

Electromagnetic safety switch

Lock once the X-ray is on, users can’t open the observation window.

Emergency stop

Next to the operation position, press to power off

Tube protection

User can't leave the software to if you don't close the X-ray tube.

Function module

Operation

Keyboard and mouse can finish all operations

X-ray tube

control

Using mouse to click the X button can turn on or off the X-ray. The real-time tube voltage and current value will display beside, users can click up and down button, or drag the slider, or type to adjust.

Status bar

Indicates the interlock status, pre-heat status, and X-ray status by flashing alternately red and green.

Image effect adjustment

The brightness, contrast and gain of the image can be adjusted freely to achieve a satisfactory result.

Product list

Users can save the inspection parameters such as Z-axis position, brightness, contrast and gain, and can directly call the parameters when inspecting the same product, to improve the inspection efficiency.

Navigation

window

After the camera takes a photo of the table, click anywhere in the photo, the table will move to the place you click and display on the screen.

Motion axis status

Display real-time coordinates.

Inspection result

The measurement results (voids rate, distance, area, etc., set by users) display in order.

Speed control

The movement speed of each axis can be adjusted to slow, normal and fast.

Voids rate measurement

Automatic calculation

Click on two points to determine a rectangle. The software automatically finds and measures the edge of the solder ball in the rectangle, the pad and the internal voids, and can get the data of the voids rate, the area of the solder ball, the circumference, the biggest void’s rate, the length and the width, and indicates NG or OK by red and green.

Parameters adjustment

Users can adjust the grayscale threshold, pixel, contrast, size filtering and other parameters to get accurate results of automatic calculation.

Add voids

manually

Users can draw a polygon or a free figure and calculate it as a void into the void rate.

Save

parameters

Users can save parameters such as grayscale threshold, pixel, contrast, size filtering and other parameters, and can directly call the parameters when detecting the same product, to improve the detection efficiency.

Other measurement function

Distance

Click the A and B points to set as the baseline, then click the C point to measure the vertical distance from the C point to the baseline.

Distance rate

It is mostly used to measure the soldering rate of the through-hole. Set one more point “D” than the distance. Divide the vertical distance from the D point to baseline by the vertical distance of the C point, to obtain the percentage ratio of the vertical distance of D to C.

Angle

Click the A and B points to set as the baseline, then click the C point to measure the angle between the BA and BC rays.

Radius

It is mostly used to measure round components such as solder balls. Click three points to determine a circle and measure the circumference, area and radius.

Perimeter

It is mostly used to measure square components, click two points to determine a square, measure the length, width and area.

Automatic inspection

Manual setting

Users can set any positions on the table as inspection points, the software will automatically inspect and save the picture.

Array

For the regular inspection points, users only need to set two of the inspection points and the number of rows and columns, the software will automatically inspect each point and save pictures.

Automatic

identification

For inspection points with obvious features, the software automatically identifies the positions, takes measurements, and saves the image.