Vacuum deposition furnace: Mainly used for the preparation of carbon-carbon composite
materials, and the deposition furnace is mainly used for the
preparation of pyrolytic carbon coating on the surface of graphite,
semiconductor devices and heat-resistant scour materials. Parameter /Model No. | JT-0305-C | JT-0505-C | JT-0608-C | JT-0608-C | JT-0812-C | JT-1120-C | JT-1218-C | JT-1520-C | Working Zone Size
φ×H(mm) | 300×500 | 500×500 | 600×800 | 600×1200 | 800×1200 | 1100×2000 | 1200×1800 | 1500×2000 | Highest Temperature
(℃) | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | Temperature uniformity(℃) | ±5 | ±5 | ±5/±7.5 | ±7.5/±10 | ±7.5/±10 | ±10/±15 | ±10/±15 | ±15/±20 | Limit Vacuum Degree(Pa) | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | Limit Vacuum Degree(Pa) | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | Heating method | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction |
Design temperature | 1250℃/1650℃/1800℃/2200℃ | Common temperature | 900~1200℃ | Vacuum degree | < 50Pa | Pressure rise rate | 6.67pA /h(or 150Pa/24h) in cold state of empty furnace | Heating mode | graphite resistance heating or induction heating, independent
temperature control, good temperature uniformity | Atmosphere medium | vacuum /CH4/C3H6/H2/N2/Ar |
Gas control mode | mass flow meter control, multi-channel gas path, uniform flow
field, no deposition dead Angle, good deposition effect;Multi-stage
and efficient exhaust treatment system, environmentally friendly,
easy to clean up | Furnace type | square, round, vertical or horizontal structure (non-standard
design), fully enclosed deposition chamber, good sealing effect,
strong anti-pollution ability; | Furnace cooling mode | furnace shell water cooling, external circulation quick cooling
system can be selected, short cooling time, high production
efficiency; |
Structure form | horizontal - side discharge, vertical - up/down discharge | Locking mode | manual/automatic | Shell material | inner stainless steel/all stainless steel | Insulation material | carbon felt/graphite felt/carbon fiber cured felt | Infrared instrument | single colorimetric/double colorimetric | Power supply | KGPS/IGBT(only suitable for medium frequency heating)
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