CVD CVI Treatment Vapor Deposition Furnace Graphite Resistance Heating With Cooling System

(1) The electric heating way:uniform heating, simple operation, easy control and maintenance.
(2) The furnace is made of special materials with strong high temperature resistance, which can withstand the weight of high temperature heating elements and heavy components, and has excellent sealing performance, which can effectively prevent the sediment growing on the substrate from being contaminated.
(3) Intelligent pressure control, small pressure fluctuation;
(4) The fully enclosed structure has good thermal stability, good sealing effect and strong anti-pollution ability;
(5) Multi-channel process gas path, uniform flow, no deposition dead Angle, good deposition effect;
(6) Multi-stage high-efficiency exhaust treatment system, environmentally friendly, efficient collection of tar and by-products, easy to clean;
(7)The cooling method is adopted, the shell is cooled by water, the external circulation fast cooling system can be selected, the cooling time is short, and the production efficiency is high.